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Faculty & Staff

School of Engineering Mechanical Engineering Faculty & Staff

Dr. Kamran Shavezipur - Associate Professor

Patent

  • Shavezipur, M., Sumita, M., Mazrouei, R., “Pathogen Transport Modelled Biomimetic Sensor, Sensing Method, and Fresh Food Sanitization”, US patent 11,480,458 B2, 2022.
  • Yousef, A., Kasler, D., Shavezipur, M., “Thermal Simulator,” US patent, US 10,466,188 B2, 2019.
  • Yousef, A., Kasler, D., Shavezipur, M., “Thermal Simulator,” US patent, US 9,568,457 B2, 2017.

Invited talk

PUBLICATIONS

Peer Reviewed Journal Papers

  • Ebrahimpour Tolouei, N., Ghamari, S., and Shavezipur, M., “Development of Circuit Models for Electrochemical Impedance Spectroscopy (EIS) Responses of Interdigitated MEMS Biochemical Sensors,” Electroanalytical Chem., 878, 2020, 114598, 11 pp.
  • Ebrahimpour Tolouei, N., Mazrouei, R., and Shavezipur, M., “Three-Dimensional Impedance-Based Sensors for Detection of Chemicals in Aqueous Solutions,” J. Anal. Bioanal. Methods, 2, 2020, 12 pp.
  • Othayq, M. M., Giganti, N., and Shavezipur, M., “Development of capacitive temperature sensors with high sensitivity using a multiuser polycrystalline silicon process,” Microelectronics Eng., 226, 2020, 111287,6 pp.
  • Mazrouei, R., Huffman, B., Sumita, M., Shavezipur, M., “Development of an impedance-based interdigitated biochemical sensor using a multiuser silicon process,” Micromech. Microeng., 29, 2019, 075011, 6 pp.
  • Pang, Y., Shu, Y., Shavezipur, M., Wang, X., Mohammad M. A., Yang, Y., Zhao, H., Deng, N., Maboudian, R., and Ren, T.-L., “3D Stretchable Arch Ribbon Array Fabricated via Grayscale Lithography,” Scientific Reports, 6, 2016, 28552, 8pp.
  • Gavahian, M., Farahnaky, A., Shavezipur, M., and Sastry, S., “Ethanol Concentration of Fermented Broth by Ohmic-assisted Hydrodistillation,” Innovative Food Sci. and Emerging Tech., 35, 2016, pp. 45-51.
  • Lin, H., Shavezipur, M., Yousef, A., and Maleky, F., “Prediction of growth of Pseudomonas fluorescens in milk during storage under fluctuating temperature,” Dairy Sci., 99(3), 2016, pp. 1-9.
  • Paluri, S., Shavezipur, M., Heldman, D. R., and Maleky, F., “Characterization of Moisture Migration in Lipids using Magnetic Resonance Imaging,” RSC Advances, 5, 2015, pp. 76904-76911.
  • Shavezipur, , Harrison, K., Lee, W. S., Mitra, S., Wong, H.-S. P., and Howe, R. T., “Partitioning Electrostatic and Mechanical Domains in Nanoelectromechanical Relays,” IEEE J. Microelectromechanical Sys., 24(3), 2015, pp. 592-598.
  • Parsa, R., Lee, S., Shavezipur, M., Provine, J., Maboudian, R., Mitra, S., Wong, H.-S. P., Howe, R. T., “Laterally Actuated Platinum-Coated Polysilicon Nanoelectromechanical (NEM) Relays,” IEEE J. Microelectromechanical Sys., 2013, 22(3), pp. 768-778.
  • Shavezipur, , Gou, W., Carraro, C., and Maboudian, R., “Characterization of Adhesion Force in MEMS at High Temperature using Thermally Actuated Microstructures,” IEEE J. Microelectromechanical Sys., 21(3), 2012, pp. 541-548.
  • Shavezipur, , Gou, W., Carraro, C., and Maboudian, R., “Inline Measurement of Adhesion Force using Electrostatic Actuation and Capacitive Readout,” J. Microelectromechanical Sys. Lett., 21(4), 2012, pp. 768-770.
  • Laboriante, , Farrokhzad, N., Fisch, M., Shavezipur, M., Carraro, C., Maboudian, R., Q. Bai, M. Liu, and S. Hoen, “Charging and Discharging Behavior in Dielectric-coated MEMS Electrodes Probed by Kelvin Probe Force Microscopy,” J. Micromech. Microeng., 22(6), 2012, 065031, 9 pp.
  • Shavezipur, , Nieva, P., Hashemi, S. M., and Khajepour, A., “Linearization and Tunability Improvement of MEMS Capacitors using Flexible Electrodes and Nonlinear Structural Stiffness,” J. Micromech. Microeng., 22, 2012, 025022, 10 pp.
  • Shavezipur, M., Li, H., Laboriante, I., Gou, W., Carraro, C., and Maboudian, R., “A Finite Element Technique for Accurate Determination of Interfacial Adhesion Force in MEMS using Electrostatic Actuations,” J. Micromech. Microeng., 21, 2011, 115025, 10 pp.
  • Li, H., Laboriante, I., Liu, F., Shavezipur, M., Bush, B., Carraro, C., and Maboudian, R., “Measurement of Adhesion Forces Between Polycrystalline Silicon Surfaces via a MEMS Double-Clamped Beam Test Structure,” J. Micromech. Microeng., 20(9), 2010, 095015, 10 pp.
  • Shavezipur, M., Nieva, , Khajepour, A., and Hashemi, S. M., “Development of Parallel-Plate-Based MEMS Tunable  Capacitors with Linearized Capacitance-Voltage Response and Extended Tuning Range,” J. Micromech. Microeng., 20(2), 2010, 025009, 8 pp.
  • Shavezipur, M., Hashemi, M., Nieva, P., and Khajepour, A., “Development of a Triangular-Plate MEMS Tunable Capacitor with Linear Capacitance-Voltage Response,” Microelectronics Eng., 87, 2010, pp. 1721–1727.
  • Shavezipur, , Nieva, P., Hashemi, S. M., and Khajepour, A., “A Parallel-Plate-Based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response,” Sensors & Transducers, 7, Special Issue “MEMS: From Micro Devices to Wireless Systems,” 2009, pp. 15-24.
  • Shavezipur, , and Hashemi, S. M., “Free Vibration Analysis of Triply Coupled Centrifugally Stiffened Beams: A Refined Dynamic Finite Element,” J. Aerospace Sci. Tech., 13, 2009, pp. 59-70.
  • Shavezipur, M., Ponnambalam, , Khajepour, A., and Hashemi, S. M., “Fabrication Uncertainties and yield optimization in MEMS Tunable Capacitors,” Sensors and Actuators A: Physical, 147, 2008, pp. 613-622.
  • Shavezipur, , Khajepour, A., and Hashemi, S. M., “The application of structural nonlinearity in development of linearly tunable MEMS capacitors,” J. Micromech. Microeng., 18(3), 2008, 035016, 8 pp.
  • Shavezipur, , Khajepour, A., and Hashemi, S. M., “Development of Novel Segmented-Plate Linearly Tunable MEMS Capacitors,” J. Micromech. Microeng., 18(3), 2008, 035035, 8 pp.
  • Shavezipur, , Ponnambalam, K., Hashemi, S. M., and Khajepour, A., “A Probabilistic Design Optimization for MEMS Tunable Capacitors,” Microelectronics J., 39(12), 2008, pp. 1528-1533.
  • Shavezipur, M., Khajepour, , and Hashemi, S. M., “A Novel Linearly Tunable Butterfly-Shape MEMS Capacitor,” Microelectronics J., 39(5), 2008, pp. 756-762.

Peer Reviewed Conference Papers

  • Shavezipur, M., Raasch, K., Bequette, A., and Sumita, M., “Real-time Monitoring of Biochemical Synthesis using Electrochemical Impedance Spectroscopy (EIS) and MEMS Interdigitated Sensors”, 2025 ASME Int. Design Eng. Tech. Conf., Anaheim, CA, IDETC2025-169051, 5 pp.
  • Naderian, P., and Shavezipur, M., “Application of Machine Learning in Design and Optimization of MEMS Tunable Capacitors”, 2024 ASME Int. Design Eng. Tech. Conf., Washington DC, IDETC2024-143542, 8 pp.
  • Zamiri, A., and Shavezipur, M., “A Three-Electrode Three-Dimensional Impedance-Based Biochemical Sensor for Food Safety Applications”,2023 ASME Int. Mech. Eng. Cong. & Expo., IMECE 2023, New Orleans, LA, USA, IMECE2023-116977, 5 pp.
  • Rafiee, N., Huffman, B., and Shavezipur, M., “Development of a Novel three-dimensional parallel-plate Biochemical Sensor for Electrochemical Impedance Spectroscopy (EIS),” 2022 ASME Int. Design Eng. Tech. Conf., St Louis, MO, IDETC2022-90378, 6 pp.
  • Shavezipur, M., “Design and Simulation of a MEMS Capacitive Pressure Sensor with Corrugated Membrane and Linear Capacitance-Pressure Response,” 2022 ASME Int. Design Eng. Tech. Conf., St Louis, MO, IDETC2021-90093, 5 pp.
  • Shahi, M., and Shavezipur, M., “A MEMS tunable capacitor with dual Deformation Modes and High tunability and linearity,” 2021 ASME Int. Design Eng. Tech. Conf., IDETC2021-69831, 6 pp.
  • Patel, H., Yan, T., and Shavezipur, M., “Analysis of Capillary Driven Flows Through Open Microchannels for Biosensing Application,” 2021 ASME Int. Design Eng. Tech. Conf., IDETC2021-69838, 6 pp.
  • Bhuiyan, E. K., Smith, D., Voss, E. J., Wei, C., and Shavezipur, M., “Surface Functionalization of Silicon MEMS Biochemical Sensors for The Detection of Foodborne Pathogens,” 2021 ASME Int. Design Eng. Tech. Conf., IDETC2021-69708, 6 pp.
  • Tolouei, N., Bhuyan, E. K., Hankins, M., and Shavezipur, M., “Development of a MEMS Biochemical Sensor for Detection of Phthalates in Juice Using Electrochemical Impedance Spectroscopy,” 2020 ASME Int. Design Eng. Tech. Conf., St. Louis, MO, IDETC2020-22185, 5 pp. Selected as the Best Paper Award, 2nd Place.
  • Ebrahimpour Tolouei, N., Ghamari S., and Shavezipur, M., “Investigation of the Effect of Native Oxide Layer on Performance of Interdigitated Impedance-Based Silicon Biochemical Sensors,” 2020 ASME Int. Design Eng. Tech. Conf., St. Louis, MO, IDETC2020-22185, 5 pp.
  • Bhuyan, E. K., and Shavezipur, M., “Improving Linearity of Circular Capacitive Pressure Sensor by Using a Dimple Mask,” 2020 ASME Int. Design Eng. Tech. Conf., St. Louis, MO, DETC2020-22497, 5 pp.
  • Ebrahimpour Tolouei, N., and Shavezipur, M., “Linearization of Characteristic Response of a Capacitive MEMS Pressure Sensor by Patterning the Dielectric Layer,” 2020 ASME Int. Design Eng. Tech. Conf., St. Louis, MO, IDETC2020-22210, 5 pp.
  • Zandigohar, M., and Shavezipur, M., “Design and Simulations of a Novel Stiction-Free Laterally Actuated NEM Relay with Flexible Source-Drain Contact,” 2020 ASME Int. Design Eng. Tech. Conf., St. Louis, MO, IDETC2020-22721, 5 pp.
  • Othayq, M. M., Giganti, N., and Shavezipur, M., “Investigation of the Effect of Long-Term Contact on Adhesion Force in Polycrystalline MEMS Devices,” 2019 ASME Int. Design Eng. Tech. Conf., Anaheim, CA, DETC2019-97839, 5 pp.
  • Oke, S., Shavezipur, M., “A Capacitive MEMS Pressure Sensor with Wavy Membrane and Linear Capacitance-Pressure Response,” 2019 ASME Int. Design Eng. Tech. Conf., Anaheim, CA, DETC2019-98021, 6 pp.
  • Mazrouei, R., Kier, B., and Shavezipur, M., “Development of Three-Dimensional MEMS Biochemical Sensors for Low Concentration Aqueous Solutions”, 2019 ASME Int. Design Eng. Tech. Conf., Anaheim, CA, DETC2019-98071, 5 pp.
  • Mazrouei, R., Sumita, M., and Shavezipur, M., “Detection of Pathogens and Formation of Biofilms Using a three-dimensional Biomimetic Biosensing platform”, 2018 ASME Int. Design Eng. Tech. Conf., Quebec City, QC, DETC2018-86222, 5 pp.
  • Suthar, R., Shavezipur, M., “Temperature Compensation in MEMS Capacitive Pressure Sensors for Harsh Environment Applications”, 2018 ASME Int. Design Eng. Tech. Conf., Quebec City, QC, Canada, DETC2018-8354, 5 pp.
  • Huffman, B., Mazrouei, R., Bevelheimer, J., and Shavezipur, M., “Three-Dimensional Biomimetic Biosensors for Food Safety Applications”, 2017 ASME In Design Eng. Tech. Conf., Cleveland, OH, DETC2017-67446, 7 pp.
  • Harrison, K. L., Lee, W.S., Shavezipur, M., Provine, J., Mitra, S., Wong, H.-S. P., and Howe, R. T., “Dual-Beam, Six-Terminal Nanoelectromechanical Relays,” The 17th Conf. on Solid- State Sensors, Actuators and Microsystems, Transducers2013, Barcelona, Spain, June 16-20, 2013, pp. 1436-1439.
  • Shavezipur, M., Gou, W, Carraro, C., Maboudian, R., Gelmi, I., Campedelli, R., Azpeitia, M., “In-line Adhesion Monitoring and the Effects of Process Variations on Adhesion,” The 17th Conf. on Solid- State Sensors, Actuators and Microsystems, Transducers2013, Barcelona, Spain, June 16-20, 2013, pp. 1464-1467.
  • Shavezipur, M., Harrison, K. L., Lee, W. S., Espinosa, B., Provine, J., Mitra, S., Wong, H.-S. P., and Howe. R. T., “Contact Properties of Thin Titanium Nitride Sidewall Coating for Nanoelectromechanical Electronics,” Nanotech Conf. and Expo 2013, Washington, DC, March 12-16, 2013, 4 pp.
  • Shavezipur, M., Carraro, C., and Maboudian, R., “Effects of actuation methods and temperature on adhesion force between polycrystalline silicon surfaces in MEMS,” SPIE Photonic West 2013, San Francisco, USA, February 2-7, 2013, v 8614, pp. 861402-1-7, invited paper.
  • Shavezipur, , Lee, W.S., Harrison, K., Provine, J., Mitra, S., Wong, H.-S. P., Howe, R.T., “Laterally Actuated Nanoelectromechanical Relays with Compliant, Low resistance Contact,” The 26th Int. Conf. on Microelectromechanical Sys., MEMS2013, Taipei, Taiwan, January 20-24, 2013, pp. 520-523.
  • Shavezipur, , Kim, Y., Carraro, C., and Maboudian, R., “Silicon-based Gecko-inspired Adhesive Structures with Active and Passive Adhesion Control,” Technical Digest of Workshop on Technologies for Future Micro- Nano Manufacturing, MFG2011, Napa, California, USA, August 8-10, 2011, pp. 2778-2781.
  • Shavezipur, , Li, G. H., Gou, W., Carraro, C., and Maboudian, R., “Measurement of Adhesion Force at Elevated Temperatures in MEMS using Thermal-Structural Actuation,” The 16th Int. Conf. on Solid- State Sensors, Actuators and Microsystems, Transducers2011, Beijing, China, June 5-9, 2011, pp. 2414-2417.
  • Parsa, , Shavezipur, M., Lee, W.S., Chong, S., Wong, H.-S. P., Maboudian, R., Howe, R.T., “Nanoelectromechanical Relays with Decoupled Electrode and Suspension,” The 24th Int. Conf. on Microelectromechanical Sys., MEMS2011, Cancun, Mexico, January 23-27, 2011, pp. 1361-1364.
  • Sohi, N., Shavezipur, M., Nieva, P., and Khajepour, A., “Modeling of a Multifunctional Pressure-Temperature Sensor,” ASME Int. Mech. Eng. Cong. and Expo, Orlando FL, November 13-19, 2009, IMECE2009-12930, pp. 527-533.
  • Shavezipur, , Wong, C., Nieva, P., and Khajepour, A., “Design and Modeling of a MEMS Capacitive Temperature Sensor with Linear Capacitance-Temperature Response,” ASME Int. Mech. Eng. Cong. and Expo, Orlando FL, November 13-19, 2009, IMECE2009-12790, pp. 513-518.
  • Sohi, N., Shavezipur, M., Nieva, P., and Khajepour, A., “A Structurally Multifunctional Pressure-Temperature Sensor,” 2nd Microsystems and Nanoelectronics Research Conf. (MNRC), Ottawa, ON, Canada, 2009, pp. 65-68.
  • Shavezipur, , Nieva, P., Khajepour, A., and Hashemi, S. M., “Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices,” Nanotech Conf. and Expo 2009, Houston, TX, May 3-7, 2009, Vol. 3, pp. 264-267.
  • Shavezipur, M., Nieva, , Khajepour, A., and Hashemi, S. M., “A Parallel-Plate-Based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response,” Nanotech Conf. and Expo 2009, Houston, TX, May 3-7, 2009, Vol. 3, pp. 256-259.
  • Bassiachvili, E., Stewart, , Shavezipur, M., and Nieva, P., “A MEMS Capacitive, Passively Powered Heart Rate Monitor: Design and Analysis,” 1st Microsystems and Nanoelectronics Research Conf. (MNRC), Ottawa, ON, Canada, 2008, pp. 81-84.
  • Syed, , Mu, L., Shavezipur, M., and Nieva, P., “Eliminating the Galvanic Effect for Microdevices Fabricated with PolyMUMPs,” 1st Microsystems and Nanoelectronics Research Conf. (MNRC), Ottawa, ON, Canada, 2008, pp. 197-200.
  • Shavezipur, , Khajepour, A., Hashemi, S. M., and Nieva, P., “A Linearly Tunable MEMS Capacitor with Segmented Electrode and Enhanced Structural Stiffness,” ASME Int. Mech. Eng. Cong. and Expo, Boston, MA, October 31-November 6, 2008, IMECE2008-68081, pp. 489-493.
  • Shavezipur, , Khajepour, A., Hashemi, S. M., and Nieva, P., “Development of a Linearly Tunable Modified Butterfly-Shape MEMS Capacitor,” ASME Int. Mech. Eng. Cong. and Expo, Boston, MA, October 31-November 6, 2008, IMECE2008-68090, pp. 495-500.
  • Shavezipur, , Hashemi, S. M., and Khajepour, A., “Novel Linearly Tunable MEMS Capacitors with flexible Moving Electrodes,” ASME Int. Design Eng. Tech. Conf., New York, NY, August 3-6, 2008, DETC2008-49272, pp. 825-830.
  • Shavezipur, , Hashemi, S. M., and Khajepour, A., “A Novel Linear MEMS Capacitor with Triangular Electrodes and Nonlinear Structural Stiffness,” ASME Int. Design Eng. Tech. Conf., New York, NY, August 3-6, 2008, DETC2008-49270, pp. 819-824.
  • Shavezipur, M., Khajepour, A., and Hashemi, S. , “Design and Optimization of a New Highly Linear Tunable MEMS  Capacitor,” ASME Int. Mech. Eng. Cong. and Expo, Seattle, WA, November 11-15, 2007, IMECE-42506, pp. 513-519.
  • Shavezipur, , Khajepour, A., and Hashemi, S. M., “A Novel Highly Tunable Butterfly-Type MEMS Capacitor,” ASME Int. Mech. Eng. Cong. and Expo, Seattle, WA, November 11-15, 2007, IMECE-42556, pp. 187-192.
  • Shavezipur, , Khajepour, A., and Hashemi, S. M., “Design Optimization of a Novel Two-Segmented-Plate MEMS Tunable Capacitor for Linear Capacitance-Voltage Response,” 21st Canadian Congress of Applied Mechanics, Toronto, ON, June 3-7, 2007, 2 pages.
  • Shavezipur, , Hashemi, S. M. and Khajepour, A., “Novel Highly Tunable MEMS Capacitors with Flexible Structure and Linear C-V Response,” ASME Int. Design Eng. Tech. Conf., Las Vegas, NV, September 4-7, 2007, DETC2007-35908, pp. 949-955.
  • Hashemi, M., and Shavezipur, M., “A Mesh Reduction Method (MRM) for the Free Vibration Analysis of Blades,” 48th AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conf., Honolulu, Hawaii, April 23-26, 2007, AIAA2007-2297, 17 pages.
  • Shavezipur, , Ponnambalam, K., Khajepour, A., and Hashemi, S. M., “Sensitivity Analysis in Yield Optimization of MEMS Tunable Capacitors,” ASME Int. Mech. Eng. Cong. and Expo, Chicago IL, November 5-10, 2006, IMECE-14752, pp. 353-360.
  • Shavezipur, , Khajepour, A., and Hashemi, S. M., “Design and Modeling of Novel Linearly Tunable Capacitors,” ASME Int. Mech. Eng. Cong. and Expo, Chicago, IL, November 5-10, 2006, IMECE-14765, pp. 79-86.
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